TERA-print® Technology


TERA-print's beam pen lithography (BPL) technology enables a wide range of applications by combining high resolution and throughput with broad material compatibility and pattern design flexibility.

3
 

A NOVEL PHOTOLITHOGRAPHIC PRINTING APPROACH

BEAM PEN LITHOGRAPHY

Harness the utility of BPL to rapidly prototype functional devices and create arbitrary surface patterns with nano-to-microscale resolution.

 
zoomtips2.png
 

Beam pen lithography (BPL) uses a specialized, massively parallel array of apertured probes with a highly advanced digital light processing (DLP) module to independently control hundreds of thousands of microbeams of light in parallel.


With BPL, each probe can create an individual micropattern or all probes in the array can work in concert to stitch larger mm2 scale designs in a seamless manner.


The resolution of BPL is defined by probe aperture size. By making the apertures small enough, sub-diffraction limit (<250 nm) resolution can be achieved.


Not only is BPL wavelength agnostic, but also operates in an ambient environment (does not require a vacuum). As such, BPL can be used for patterning a broad spectrum of soft and hard materials.

 

Printing With Beam Pen Lithography

 

Patterning time

28 minutes

Pen Array Spacing

25 μm

LED Engine

405 nm

Feature Size

800 nm

Total Patterned Area

3.84 mm x 5.12 mm

Key Technology Publications